Abstract-The popularisation of the microsystems has paved a way for the evolution of a new class of controlled drug delivery devices which allow tailored delivery of drugs. Additionally, these drug delivery systems enhance efficiency and patient consent. Developing better drug delivery methods is the prime target of the pharmaceutical companies worldwide. The process of drug delivery is as essential as the drug's activity in deciding its effectiveness. These drug delivery systems do not simply release the drug but disseminate the drug in a peculiar manner in accordance to which it has been engineered. Although in their initial stages, the microelectromechanical systems (MEMS) demonstrate the immense potential for conquering the various challenges that are faced by the present drug delivery techniques. Microneedles, micropumps, microvalves, and implantable drug delivery systems have been developed using microfabrication techniques. Several microdevices have been engineered such that they deliver multiple drugs with different dosages in series or parallel which provide several advantages such as extension in the variety of the desirable compounds and precise dosing. Transdermal drug delivery through microneedles enables enhanced permeation through skin layers into the body. Multilayer patch systems lead to an excellent approach in the oral drug delivery. This review examines various MEMS drug delivery techniques along with their diverse benefits.