Micro conveyance devices are important elements in high precision positioning systems, which play vital roles in many scientific and industrial fields and are widely needed in many applications. This work presents the modeling and experimental validation of a pre-designed and fabricated micro conveyance device. This micro conveyance device consists of eight elementary electromagnetic digital actuators and can realize a conveyance application based on a stick-slip driving principle. A dynamic model based on the prototype device was established for stick-slip displacement simulation. Four sub-models of the dynamic model regarding the calculation of actuation force and friction force within the device were built and integrated. Experiments focusing on the conveyance application were carried out to test the performance of the prototype device. It has been observed that the simulated results obtained using the dynamic model were in good agreement with the experiment results. The proposed device suggests an alternative to the micro conveyance system.

In this paper, a novel optimal 3-DoF micro-conveyor based on electromagnetic digital actuators array is proposed. The micro-conveyor consists of four electromagnetic digital actuators. Two specific control strategies have been built to realize the 3-DoF planner conveyance task. A static analytical model and a dynamic semi-analytical model based on the principle have been built for the optimal design, analysis, and necessary calculation of a prototype. The prototype was manufactured by micro-fabrication technology and several experiments were carried out. The experimental results are in good agreement with the modeling results. Benefited from the optimal design and high fabrication precision, the proposed micro-conveyor is proved to be better in magnetic homogeneity of elementary actuators, output stability, long range conveyance linearity, and have one more DoF (planar rotation) compared to the previous work.