Optical solid state deflectors rely on the electro-optical or acousto-optic effect. These Electro-Optical Deflectors (EODs) and Acousto-Optical Deflectors (AODs) do not contain moving parts and therefore exhibit high deflection velocities and are free of drawbacks associated with mechanical scanners. A description of the principles of operation of EODs and AODs is presented. In addition, characteristics, properties and the (dis)advantages of EODs and AODs, when compared to mirror based mechanical deflectors, is discussed. Deflection angles, speed and accuracy are discussed in terms of resolvable spots and related quantities. Also, response time, damage threshold, efficiency and the type and magnitude of beam distortions is addressed. Optical deflectors are characterized by high angular deflection velocities, but small deflection angles. Whereas mechanical mechanical scanners are characterized by relatively small deflection velocities, but large deflection angles. Arranging an optical deflector and a mechanical scanner in series allows to take advantage of the best of both worlds.

Using acousto-optical deflectors at high deflection speeds via acoustical frequency chirping induces astigmatism, deforming the laser beam in an unfavorable way. Within the paper, we present a method to prevent this effect for an ultrashort pulsed laser beam via acoustical frequency jumps synchronized to the pulse-to-pulse pause. We also demonstrate and give a method to calculate beam shaping capability of acousto-optical deflectors via arbitrary spatial frequency developments during ultrashort laser pulse transit through the deflector. Cylinder-lens-free deflection at >2000 rad/s and beam shaping capability is demonstrated experimentally. In our experiments the switching time between two beam shapes is 1 µs. Conf. Ser. 276, 12171 (2011). 11. K. Nemoto, T. Fujii, N. Goto, T. Nayuki, and Y. K. Kanai, "Transformation of a laser beam intensity profile by a deformable mirror," Opt. Lett. 21(3), 168-170 (1996). 12. N. Sanner, N. Huot, E. Audouard, C. Larat, J.-P. Huignard, and B. Loiseaux, "Programmable focal spot shaping of amplified femtosecond laser pulses," Opt. Lett. 30(12), 1479-1481 (2005). 13. F. M. Dickey and S. C. Holswade, Laser Beam Shaping: Theory and Techniques (Marcel Dekker, 2000). 14. A. Mermillod-Blondin, E. McLeod, and C. B. Arnold, "Dynamic pulsed-beam shaping using a TAG lens in the near UV," Appl. Phys., A Mater. Sci. Process. 93(1), 231-234 (2008). 15. Y. Naciri, A. Perennou, V. Quintard, and J. Le Bihan, "Acousto-optic deflector-based optical packet synchronization," Microw. Opt. Technol. Lett. 26(6), 394-396 (2000 2146-2148 (2008). ©2013 Optical Society of America

We introduce a method to objectively evaluate systems of differing beam deflection technologies that commonly are described by disparate technical specifications. Using our new approach based on resolvable spots we will compare commercially available random-access beam deflection technologies, namely galvanometer scanners, piezo scanners, MEMS scanners, acousto-optic deflectors, and electro-optic deflectors.

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