In this work we demonstrate the concept of stress-induced chemical detection using metalorganic frameworks (MOFs) by integrating a thin film of the MOF HKUST-1 with a microcantilever surface. The results show that the energy of molecular adsorption, which causes slight distortions in the MOF crystal structure, can be efficiently converted to mechanical energy to create a highly responsive, reversible, and selective sensor. This sensor responds to water, methanol, and ethanol vapors, but yields no response to either N 2 or O 2 . The magnitude of the signal, which is measured by a built-in piezoresistor, is correlated with the concentration and can be fitted to a Langmuir isotherm. Furthermore, we show that the hydration state of the MOF layer can be used to impart selectivity to CO 2 . We also report the first use of surface-enhanced Raman spectroscopy to characterize the structure of a MOF film. We conclude that the synthetic versatility of these nanoporous materials holds great promise for creating recognition chemistries to enable selective detection of a wide range of analytes. A force field model is described that successfully predicts changes in MOF properties and the uptake of gases. This model is used to predict adsorption isotherms for a number of representative compounds, including explosives, nerve agents, volatile organic compounds, and polyaromatic hydrocarbons. The results show that, as a result of relatively large heats of adsorption (> 20 kcal mol -1 ) in most cases, we expect an onset of adsorption by MOF as low as 10 -6 kPa, suggesting the potential to detect compounds such as RDX at levels as low as 10 ppb at atmospheric pressure.

Solid state gas sensors are a core enabling technology to a range of measurement applications including industrial, safety, and environmental monitoring. The technology associated with solid-state gas sensors has evolved in recent years with advances in materials, and improvements in processing and miniaturization. In this review, we examine the state-of-the-art of solid state gas sensors with the goal of understanding the core technology and approaches, various sensor design methods to provide targeted functionality, and future prospects in the field. The structure, detection mechanism, and sensing properties of several types of solid state gas sensors will be discussed. In particular, electrochemical cells (solid and liquid), impedance/resistance based sensors (metal oxide, polymer, and carbon based structures), and mechanical sensing structures (resonators, cantilevers, and acoustic wave devices) as well as sensor arrays and supporting technologies, are described. Development areas for this field includes increased control of material properties for improved sensor response and durability, increased integration and miniaturization, and new material systems, including nano-materials and nano-structures, to address shortcomings of existing solid state gas sensors.

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This paper describes a novel wafer bonding technique using microwave heating of parylene intermediate layers. The bonding is achieved by parylene deposition and thermal lamination using microwave heating. Variable frequency microwave heating provides uniform, selective and rapid heating for parylene intermediate layers. The advantages of this bonding technique include short bonding time, low bonding temperature, relatively high bonding strength, less void generation and low thermal stress. In addition, the intermediate layer material, parylene, is chemically stable and biocompatible. This bonding technique can be used for structured wafers also because parylene provides a conformal coating. Therefore, this is a very attractive bonding tool for many MEMS devices. The bonding strength and uniformity were evaluated using diverse tools. Fracture mechanisms and the effects of bonding parameters and an adhesion promoter were also investigated. The bonding with a structured wafer was also successfully demonstrated.