We present a novel technique that intrinsically mitigates the quantum-defect heating in Raman lasers. The basic principle of this so-called "coherent anti-Stokes Raman scattering (CARS)-based heat mitigation" is to suppress the phonon creation in the Raman medium by increasing the number of out-coupled anti-Stokes photons with respect to the number of out-coupled Stokes photons. We demonstrate with the aid of numerical simulations that for a hydrogen and a silicon Raman laser, CARS-based heat mitigation efficiencies of at least 30% and 35%, respectively, can be obtained.

We present experimental results on the intracavity generation of radially polarized light by incorporation of a polarization-selective mirror in a CO 2 -laser resonator. The selectivity is achieved with a simple binary dielectric diffraction grating etched in the backsurface of the mirror substrate. Very high polarization selectivity was achieved, and good agreement of simulation and experimental results is shown. The overall radial polarization purity of the generated laser beam was found to be higher than 90%.

A polarization beam splitter (PBS) based on a giant-reflection to zero-order (GIRO) grating is presented. The GIRO grating is a simple binary diffraction grating with parameters chosen such that the excited optical modes in the grating interfere constructively and destructively at the respective interfaces. This interference results in high-zero-order reflection (>99%) with a high polarization-selective extinction ratio (+/-30 dB). The grating shows a low aspect ratio. The GIRO PBS is theoretically and experimentally shown to be an adequate PBS for use as an optical isolator in combination with a quarter-wave plate in a CO2-laser system.

Two implementations are identified to create a Bessel beam directly, i.e. without the spatial filtering of an initially Gaussian beam. The first implementation is based on a resonator configuration whose lowest-loss transverse mode is a Bessel beam. Numerical simulation to corroborate the geometrical optical arguments is presented. The second implementation is based on the theorem that the angular-plane wave spectrum of a Bessel beam is composed of a cone of wave vectors. This cone is also generated through a phase-matching condition in a four-wave mixing process. This leads to the conclusion that anti-Stokes radiation generated in a nonlinear material will leave the substrate under the form of a Bessel beam.

We have developed a multilayer mirror for extreme ultraviolet (EUV) radiation that has low reflectance for IR radiation at 10.6 mum wavelength. The mirror is based on a multilayer coating comprising alternating layers of diamondlike carbon and silicon, for which we demonstrate an EUV reflectance of up to 49.7%. We have made a functional prototype in which the multilayer coating is included as part of an antireflection coating for IR radiation, resulting in reflectance values of 42.5% and 4.4% for EUV and IR, respectively. The mirror can replace a standard Mo/Si mirror in an EUV lithography tool to form an efficient solution for the suppression of unwanted CO(2) laser radiation.