The paper presents the investigation on the influence of substrate temperature T s and the sprayed initial solution volume V s on structural, substructural, optical properties, and elemental composition of ZnO and Cu 2 ZnSnS 4 (CZTS) films as well as state-of-the-art of studying the Cd 1−x Zn x Te (CZT) films obtained by spray pyrolysis technique. The singlephase nanocrystalline ZnO films with average crystallite size of D C = 25-270 nm and thickness of d = 0.8-1.2 μm can be deposited at substrate temperatures of T s > 473 K. The continuous CZTS films with optimal thickness (d = 1.3 μm) for application as absorber layers in solar cells were deposited at the sprayed initial precursor volume of V s = 5 ml. The increase of the substrate temperature up to 673 K caused the significant improvements in the stoichiometry of ZnO films. The optimal stoichiometry ratio of CZTS films for application in solar cells was obtained at V s = 3-4 ml. Optical study of ZnO films showed that these films have a high-transmission coefficient values of T = 60-80%. To the best of our knowledge, there is the lack of works devoted to the study of CZT films obtained by spray pyrolysis technique.