Hot electron transport of direct and scattered carriers across an epitaxial NiSi 2 /n-Si(111) interface, for different NiSi 2 thickness, is studied using Ballistic Electron Emission Microscopy (BEEM).We find the BEEM transmission for the scattered hot electrons in NiSi 2 to be significantly lower than that for the direct hot electrons, for all thicknesses. Interestingly, the attenuation length of the scattered hot electrons is found to be twice larger than that of the direct hot electrons. The lower BEEM transmission for the scattered hot electrons is due to inelastic scattering of the injected hot holes while the larger attenuation length of the scattered hot electrons is a consequence of the differences in the energy distribution of the injected and scattered hot electrons and the increasing attenuation length, at lower energies, of the direct hot electrons in NiSi 2 .

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