Laser surface texturing is used more and more often in modern machines for the implementation of variety of purposes such as for example intensification of lubrication, intensification of heat exchange, stimulation of microfluidics, increasing the chemical activity of the surface. Owing to the development of technologies using a concentrated energy flux, including laser microprocessing, it has become feasible. The present paper concentrates on the selection of parameters of laser microprocessing with picosecond pulses so as to obtain the highest efficiency and accuracy of the execution of a single texture element.Keywords: laser microprocessing, laser surface texturing (LST), laser ablation, ultrashort pulses W nowoczesnych maszynach dla realizacji różnych celów m.in. takich jak przykładowo intensyfikacja smarowana, intensyfikacja wymiany ciepła, stymulowanie mikroprzepływów, zwiększenie aktywności chemicznej powierzchni; coraz częściej stosuje się teksturowanie powierzchni. Stało się to możliwe dzięki rozwojowi technologii wykorzystujących skoncentrowany strumień energii, do których należy mikroobróbka laserowa. Tematyka opracowania koncentruje się na analizie parametrów mikroobróbki laserowej impulsami pikosekundowymi w celu osiągnięcia jak największej wydajności i dokładności wykonania pojedynczego elementu tekstury.
This article presents some results of laser processing of materials, used for the construction of microsystems and micro-sensors, e.g. Si, Al2O3 and zirconia ceramics. The necessity of faithful reproducing the geometry and dimensions in the micro-scale puts specific requirements for laser machining process. Laser micro-technologies must be conducted under conditions which ensure the perfect guidance of a well-focused laser beam, scanning at a suitable speed, and the laser pulse duration with proper repetition frequency. The amount of absorbed energy depends on wavelength of laser radiation and kind of material, which also influence on this process. All these conditions should take into account the need to maintain a small heat affected zone (HAZ). This guarantees keeping the true reproduction of micro-shapes and cutting edges with a different angle of lines even in micro-scale details. The present work confirms the possibility of using laser technology for such applications.
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