A control approach to achieve nanoscale broadband viscoelastic measurement using scanning probe microscope (SPM) is reported. Current SPM-based force measurement is too slow to measure rate-dependent phenomena, and large (temporal) measurement errors can be generated when the sample itself changes rapidly. The recently developed model-less inversion-based iterative control technique is used to eliminate the dynamics and hysteresis effects of the SPM hardware on the measurements, enabling rapid excitation and measurement of rate-dependent material properties. The approach is illustrated by the mechanical characterization of poly(dimethylsiloxane) over a broad frequency range of three orders of magnitude (∼1 Hz to 4.5 KHz).
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