Finite element modeling of a shape memory alloy (SMA)-layered microcantilever is reported herein. It is assumed that the SMA layer is “two-way–trained,” such that alternate heating and cooling of the SMA layer will cause a phase transformation in the SMA layer and deform the cantilever out-of-plane and back. For a nickel–titanium (NiTi) layer on a glass substrate, computational results indicate that a uniform 4% two-way strain along the length of a SMA layer spanning the full length of a 100-μm cantilever translates to a tip deflection of 29.5 μm, and a sweep of approximately 30° from the flat “rest” state. As well, 40% of the cantilever surface (measured from its free end) is flat and can be used as a flat reflective surface for micromirror applications. A “worse-case” analysis is presented where only 50% of the SMA length is able to undergo phase transformation, resulting in deflections of about 10 μm with a 12° sweep. Finally, it is shown that deflections are about two orders of magnitude higher than what would be possible if the SMA layer did not undergo phase transformations (but underwent pure thermal expansion only). One possible area of application could be in the area of continuously rotating micromirrors, suitable for surveillance systems.
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