We present experimental measurements of electromigration current through a single cylindrical nanopore. A single cylindrical nanopore with 175 nm diameter was fabricated in silicon in series with two micropores with 2 and 100 microm diameters. Thick electrical double layers (EDLs) (kappa a approximately 1) exhibit current rectification due to asymmetric concentration polarization while thinner EDLs show nearly symmetric conductance. After the electric field is turned off, electrical current is measured and observed due to redistribution of ions in the concentration polarization layer.

Results demonstrating the field effect modulation of ionic transport through an array of cylindrical nanopores fabricated in silicon-on-insulator substrates are presented. Pronounced modulation of the conductance is observed at low electrolyte concentrations when the electric double layers within the nanopores are overlapping. A numerical model based on Brownian dynamics reproduces the measured data.

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