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films were implanted by 80, 120, 200, 270 and 350 keV ions with the same dose of . The depth profiles of fluorine have been accurately measured using resonant nuclear reaction at with width . These true distributions of fluorine were extracted from the experimental excitation yield curves by a proper multiple-convolution method. The range distribution parameters, the average projected ranges and the projected range straggles were then obtained. These experimental parameters were compared with theoretical predictions using the Monte Carlo simulation of TRIM'92. In present work of the F - YBCO system, the experimental values of agree with the theoretical results very well to within %, but the experimental projected range straggles, , are larger than the TRIM'92 predictions by factors of more than 20%. These results may contribute to progress both in ion beam modification in high-temperature superconducting films and range profile theory of ions in polycompound targets.

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