Over the past years, broadband achromatic metalenses have been intensively studied due to their great potential for applications in consumer and industry products. Even though significant progress has been made, the efficiency of technologically relevant silicon metalenses is limited by the intrinsic material loss above the bandgap. In turn, the recently proposed achromatic metalens utilizing transparent, high-index materials such as titanium dioxide has been restricted by the small thickness and showed relatively low focusing efficiency at longer wavelengths. Consequently, metalens-based optical imaging in the biological transparency window has so far been severely limited. Herein, we experimentally demonstrate a polarization-insensitive, broadband titanium dioxide achromatic metalens for applications in the near-infrared biological imaging. A large-scale fabrication technology has been developed to produce titanium dioxide nanopillars with record-high aspect ratios featuring pillar heights of 1.5 µm and ~90° vertical sidewalls. The demonstrated metalens exhibits dramatically increased group delay range, and the spectral range of achromatism is substantially extended to the wavelength range of 650–1000 nm with an average efficiency of 77.1%–88.5% and a numerical aperture of 0.24–0.1. This research paves a solid step towards practical applications of flat photonics.
Metalenses have emerged as a new optical element or system in recent years, showing superior performance and abundant applications. However, the phase distribution of a metalens has not been measured directly up to now, hindering further quantitative evaluation of its performance. We have developed an interferometric imaging phase measurement system to measure the phase distribution of a metalens by taking only one photo of the interference pattern. Based on the measured phase distribution, we analyse the negative chromatic aberration effect of monochromatic metalenses and propose a feature size of metalenses. Different sensitivities of the phase response to wavelength between the Pancharatnam-Berry phase-based metalens and propagation phase-reliant metalens are directly observed in the experiment. Furthermore, through phase distribution analysis, it is found that the distance between the measured metalens and the brightest spot of focusing will deviate from the focal length when the metalens has a low nominal numerical aperture, even though the metalens is ideal without any fabrication error. We also use the measured phase distribution to quantitatively characterise the imaging performance of the metalens. Our phase measurement system will help not only designers optimise the designs of metalenses but also fabricants distinguish defects to improve the fabrication process, which will pave the way for metalenses in industrial applications.
On‐chip integrated micro‐ and nanoscale vortex lasers are key elements for addressing the exponentially growing demand for information capacity. Although tunable vortex microlasers have been reported, each laser pulse still possesses one particular topological charge and requires additional multiplexing. In this study, the simultaneous generation of coherent laser arrays with different topological charges by combining metalenses with semiconductor microlasers is demonstrated. A TiO2 vortex metalens converts two orbital angular momentum beams into the same diffraction‐limit spot with opposite circular polarizations through spin‐to‐orbital conversion. Consequently, the microlaser emission at the focal spot, which can be decomposed into two circularly polarized beams, is collimated into vortex microlaser beams with two different topological charges through a time‐reversal process. This concept is extended to a 2 × 2 metalens array by introducing off‐axis terms, and eight topological charges are produced simultaneously. This research is a significant step toward the on‐chip integration of micro‐ and nanolasers.
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