Superconducting terahertz (THz) metamaterial (MM) made from niobium (Nb) film has been investigated using a continuous-wave THz spectroscopy. The quality factors of the resonance modes at 0.132 THz and 0.418 THz can be remarkably increased when the working temperature is below the superconducting transition temperature of Nb, indicating that the use of superconducting Nb is a possible way to achieve low loss performance of a THz MM. In addition, the tuning of superconducting THz MM by a magnetic field is also demonstrated, which offers an alternative tuning method apart from the existing electric, optical and thermal tuning methods.

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For high-quality superconducting tunnel junctions (STJs), it is necessary to reduce leakage current as much as possible. We describe the fabrication of niobium STJs using the selective niobium (Nb) etching process and various ways to minimize the leakage current. The experiment shows that the leakage current mainly comes from shorts in the tunnel barrier layer rather than those around the junction edges. Through systematic analysis of the thin film stress, surface morphology and modified junction structures, we fabricate high-quality Nb STJs with a gap voltage of 2.8 mV and a leakage current at 1 mV as low as 8.1% and 0.023% at 4.2 K and 0.3 K, respectively.