Surface morphologies of MEH-PPV:PCBM active layers were optimized by investigating ITO substrate treated with oxygen and nitrogen plasma. This treatment effectively improved smoothness, transmittance, and contact angle of ITO's, resulting in good anode contacts for hybrid device structures. The consistently improved performance of hybrid solar cells was also achieved. The surface properties of treated and untreated ITO substrates were compared by contact angle, four point probe, scanning electron microscopy, and atomic force microscopy.

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