Polyatomic projectiles such as C 60+ have been used for molecular sputter depth profiling in time-of-flight static secondary ion mass spectrometry (ToF-S-SIMS). However, the practical application for nanoscale analysis problems still depends on the likely change of secondary ion yield with depth. Therefore, ultra-low-angle microtomy ( The results show that ULAM is a valuable tool to complement the exploratory use of direct sputter depth profiling. To the best of our knowledge, this feasibility study is the first to show the experimental verification of molecular C 60 + sputter depth profiles.