We present the design and integration of a nine-pH microsensor array on a single silicon substrate with its own signal readout circuit, integrated in a 0.6-μm commercial standard complementary metal oxide semiconductor (CMOS) process. An ion sensitive field effect transistor (ISFET) has been used as pH microsensor and an instrumentation amplifier as the read-out circuit. The ISFET structure is conformed by the channel length and ratio of MOS transistor, gate extended and the selective membrane, for which silicon nitride (Si₃N₄) is employed as an ion selective element. The complete design includes shielding around the pH microsensor and the readout circuit to avoid leakage of current to the substrate. The readout circuit is composed by three operational amplifiers and resistances that form the instrumentation amplifier, with a ±2.5 V bias has a 50 dB gain, power supply rejection ratio (PSSR) of 120 dB and common mode rejection ratio (CMRR) of 127 dB. The complete system is integrated in a 1.12 mm² silicon area; it presents a 59 mV/pH linearity, within a concentration range of 2 to 12 of pH level, making it a good alternative for biological or medical applications.

Wearable energy harvesters have potential application in the conversion of human-motion energy into electrical energy to power smart health-monitoring devices, the textile industry, smartwatches, and glasses. These energy harvesters require optimal rectifier circuits that maximize their charging efficiencies. In this study, we present the design of a novel complementary metal-oxide semiconductor (CMOS) reconfigurable rectifier for wearable piezoelectric energy harvesters that can increase their charging efficiencies. The designed rectifier is based on standard 0.18 µm CMOS process technology considering a geometrical pattern with a total silicon area of 54.765 µm x 86.355 µm. The proposed rectifier circuit has two transmission gates (TG) that are composed of four rectifier transistors with a charge of 45 kΩ, a minimum input voltage of 500 mV and a maximum voltage of 3.3 V. Results of numerical simulations of the rectifier performance indicate a voltage conversion efficiency of 99.4% and a power conversion efficiency up to 63.3%. The proposed rectifier can be used to increase the charging efficiency of wearable piezoelectric energy harvesters.

We reported the analysis and modeling of some conduction mechanisms in ultrathin aluminum oxide (Al2O3) films of 6 nm thickness, which are deposited by atomic layer deposition (ALD). This modeling included current-voltage measurements to metal-insulator-semiconductor (MIS) capacitors with gate electrode areas of 3.6 × 10−5 cm2 and 6.4 × 10−5 cm2 at room temperature. The modeling results showed the presence of ohmic conduction, Poole Frenkel emission, Schottky emission, and trap-assisted tunneling mechanisms through the Al2O3 layer. Based on extracted results, we measured a dielectric conductivity of 5 × 10−15 S/cm at low electric fields, a barrier height at oxide/semiconductor interface of 2 eV, and an energy trap level into bandgap with respect to the conduction band of 3.11 eV. These results could be affected by defect density related to oxygen vacancies, dangling bonds, fixed charges, or interface traps, which generate conduction mechanisms through and over the dielectric energy barrier. In addition, a current density model is developed by considering the sum of dominant conduction mechanisms and results based on the finite element method for electronic devices, achieving a good match with experimental data.

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