We have deposited boron/nitrogen-incorporated diamond-like carbon (B–N-DLC) films by pulsed laser deposition (PLD) using N2 gas and a B-containing graphite target, and compared the mechanical, tribological, electrical, and surface properties of the B–N-DLC films with those of pure DLC, boron-incorporated DLC (B-DLC), and nitrogen-incorporated DLC (N-DLC) films prepared by PLD. The B-DLC film had a much higher critical load than the pure DLC. The critical load of the B–N-DLC films became maximum at an optimum N2 pressure, which was higher than those of the pure DLC, B-DLC, and N-DLC films. The friction property in air was degraded by the N incorporation, whereas the B incorporation did not have a significant effect on the friction coefficient. The B–N-DLC films deposited at higher N2 pressures exhibited superhydrophilic wetting properties. The B–N-DLC films prepared at moderate N2 pressures had resistivities much less than that of the pure DLC film.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.