A micronozzle device was fabricated for the localized plasma treatment of a cell. The device was attached to the tips of two ϕ1.5 mm capillary tubes injecting and evacuating the discharging plasma gas. At the bottom of the channel where the discharging gas flows, nozzle holes (ϕ2%30 µm) were prepared. Controlling the injecting and evacuating gas flows made the pressure in the channel negative or positive relative to the atmosphere. The cells were trapped or released through the nozzle holes. When the cells were trapped, the nozzle hole also defined the area of plasma treatment. An atmospheric-pressure microplasma was generated (He: 0.3 L/min, power: 30 W) for localized treatment. The test specimen was a plant cell, lily pollen (length: 100-140 µm). No burning of the pollen was observed during the 10 min plasma treatment. Only part of the surface reacted with the plasma irradiation. The depth of removal was about 1.5 µm.

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