We report the formation of polyimidebased H-tree waveguides for a multi-GBit/sec optical clock signal distribution in a Si CMOS process compatible environment. Such a clock distribution system is to replace the existing electronic counterpart associated with high-speed supercomputers such as Cray T-90 machine. A waveguide propagation loss of 0.21 dB/cm at 850 nm was experimentally confirmed for the 1-to-48 waveguide fanout device. 1-to-2 splitting loss and bending loss were measured to be 0.25 dB and higher. The planarization requirement of the optical interconnection layer among many electrical interconnection layers makes the employment of tilted grating a choice of desire. Theoretical calculation predicts the 1-to-1 freespace to waveguide coupling with an efficiency as high as 95%. Currently, a coupling efficiency of 35% was experimentally confirmed due to the limited index difference between guiding and cladding layers. Further experiments aimed at structuring a larger guidingkladding layer index differences are under investigation. To effectively couple an optical signal into the waveguide through the titled grating coupler, the accuracy of the wavelength employed is pivotal. This makes the usage of the vertical cavity surface-emitting lasers (VCSELs) and VCSEL arrays the best choice when compared with edge-emitting lasers. Modulation bandwidth as high as 6 GHz was demonstrated at 850 nm. Such a wavelength is compatible withSi-based photodetectors. *Radiant Research Braker Lane Suite 420 Austin, TX 78759 Honeywell Technology Center 3660 Technology Drive Minneapolis MN 55418 6MCC Braker Lane Suite 420 Austin, TX 78759 4Temperature dependence of the threshold current up to 155 "C was measured which will determine the power dissipation issue of the optoelectronic packaging. Finally, the first fully monolithic Si-MOSFET integrated receiver was made as the optical clock signal detector. To further enhance the bandwidth of such a detector, a resonant cavity structure with Si/SiO, as the bottom mirror was employed.The measured demodulation bandwidth is over 10 GHz. A fully integrated guided-wave optical clock signal distribution system having planarized grating couplers, H-tree Si-CMOS process compatible waveguides, VCSELs and Si-based photoreceivers will be demonstrated in the near future.