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This study first presents two-dimensional (2-D) axisymmetric and three-dimensional (3-D) finite element (FE) models of nanoindentation tests. Calculated load-displacement curves from the FE models are compared with the load-displacement curves from nanoindentation measurements on annealed copper. Numerical parametric studies are also performed to examine the effect of indenter geometry and the material's stress-strain behavior on the load-displacement response. The 2-D and 3-D FE load-displacement curves compare well with the measured results on annealed copper. The second aspect of this study introduces a new modeling approach for indentation tests using artificial neural networks (ANN). In this approach, ANN models are generated to approximate the FE loaddisplacement curves for a wide range of material and geometric parameters. The ability of the ANN models to predict the indentation response is examined against other FE results not used as part of the training data. These models are shown to accurately predict the load-displacement behavior of a nonlinear homogeneous material as well as one with a hard film, such as an oxide film, on a relatively soft substrate. It is shown that the monotonic indentation load-displacement response during loading contains ample information for the ANN model to extract material flow properties of the indented material.

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