Uniform growth of pristine two dimensional (2D) materials over large areas at lower temperatures without sacrifice of their unique physical properties is a critical pre-requisite for seamless integration of next-generation van der Waals heterostructures into functional devices. This Letter describes a vapor phase growth technique for precisely controlled synthesis of continuous, uniform molecular layers of MoS2 on silicon dioxide and highly oriented pyrolitic graphite substrates of over several square centimeters at 350 °C. Synthesis of few-layer MoS2 in this ultra-high vacuum physical vapor deposition process yields materials with key optical and electronic properties identical to exfoliated layers. The films are composed of nano-scale domains with strong chemical binding between domain boundaries, allowing lift-off from the substrate and electronic transport measurements from contacts with separation on the order of centimeters.

Abstract

Low temperature pulsed laser deposited (PLD) ultrathin boron nitride (BN) on SiO2 was investigated as a dielectric for graphene electronics, and a significant enhancement in electrical transport properties of graphene/PLD BN compared to graphene/SiO2 has been observed. Graphene synthesized by chemical vapor deposition and transferred on PLD deposited and annealed BN exhibited up to three times higher field effect mobility compared to graphene on the SiO2 substrate. Graphene field effect transistor devices fabricated on 5 nm BN/SiO2 (300 nm) yielded maximum hole and electron mobility of 4980 and 4200 cm2/V s, respectively. In addition, significant improvement in carrier homogeneity and reduction in extrinsic doping in graphene on BN has been observed. An average Dirac point of 3.5 V and residual carrier concentration of 7.65 × 1011 cm−2 was observed for graphene transferred on 5 nm BN at ambient condition. The overall performance improvement on PLD BN can be attributed to dielectric screening of charged impurities, similar crystal structure and phonon modes, and reduced substrate induced doping.

Using advanced technique combining pulsed laser deposition growth of LaAlO 3 , LaTiO 3 and SrTiO 3 we effectively constructed half-integer unit cell number LaAlO 3-SrTiO 3 heterostructures where all interfaces are of LaO-TiO 2 type, and two dimensional electron gas (2DEG) forms symmetric n-type bilayer. Using ultra high vacuum scanning tunneling microscopy we investigated the properties of surface 2DEG in these heterostructures. Our results indicate that surface 2DEG is strongly, within one unit cell, confined at the interface. Tunneling spectroscopy of surface 2DEG reveals thickness dependent band gap changes attributed to quantum size effect.