A model describing the effect of an accelerator bis(3-sulfopropyl)disulfide (SPS) and the two inhibitors poly(ethylene glycol) and Janus Green B (PEG and JGB) on the leveling efficacy on submicrometer trenches of an acid-copper plating bath is described, simulated, and compared to experimental fill studies. All parameters of the model are estimated from electrochemical measurements on a nonpatterned, rotating disk electrode. A multicomponent version of a Frumkin isotherm is employed to account for the interaction between SPS and PEG, and the interaction between PEG and JGB are described by a competitive adsorption, Langmuir model. Shape-change simulations employing these descriptions of the surface phenomena are consistent with fill studies over a large range of SPS and JGB concentrations; however, simulations do not predict the result that void-free deposits are achieved when the concentration of JGB is zero. © 2001 The Electrochemical Society. All rights reserved.

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The mass-transfer limited current density on a line electrode in impinging slot-jet flows is investigated experimentally. Results are compared with numerical simulations. The feasibility of using computational fluid dynamics as a practical tool for predicting mass-transfer rates in this geometry is evaluated. Flow rates varying by up to a factor of 200 are considered, with the low end flow rates in the laminar flow regime ͑nozzle-width-based Reynolds numbers, Re, starting at 220͒ and the high end flows in the high Reynolds number turbulent flow regime, Re ϭ 40,000. The mass-transfer measurements were conducted using 100 m platinum electrodes. The use of a small, isolated line electrode makes it possible to resolve partially the sharp variations in mass-transfer rate in the stagnation region.