Pure and Nitrogen doped ZnO thin films were fabricated using spray pyrolysis method. The influence of doping on the structural, optical and morphological properties of prepared films were studied. The prepared samples were characterized through XRD (X-Ray Diffraction), FTIR (Fourier Transform Infrared Spectroscopy), FT-RAMAN (Fourier Transform Raman), optical transmittances of prepared films were studied as a function of wavelength using UV-VIS-NIR spectrophotometer and SEM (Scanning Electron Microscope). Absorption coefficient and Extinction coefficient values were calculated. Thickness of the films were found increasing with increasing doping concentrations. Structural studies confirmed that the prepared films were highly crystalline and predominantly orientation along (0 0 2) direction. On varying the doping concentration of N, a shift in the (0 0 2) peak was observed. FTIR and Raman spectral investigations revealed bands at specified wavenumber regions corresponding to stretching and bending vibrations of Zn and O. High resolution SEM images proved the presence of regular distribution of grains and the surface was found continuous, free from crack and holes. EDAX spectrum shows the attained films contain of Zinc, Oxygen and Nitrogen elements. Present investigations confirmed the fusion of nitrogen into ZnO lattice and modified the structural, optical and morphological properties of ZnO films.

Zinc Oxide thin films have been deposited on glass substrates using zinc acetate as starting precursor at different concentrations 0.05–0.3 M in steps of 0.05 M by spray pyrolysis method at the constant substrate temperature of 350º C. Lattice structure of the prepared ZnO films were characterized by X-Ray diffraction analysis (XRD). Diffraction pattern revealed hexagonal wurtzite structure with cell edges a = 3.2530 Å, c = 5.2092 Å and density 5.66 g/cm3, which is almost equal to the standard values a = 3.2556 Å, c = 5.2070 Å and 5.6525 g/cm3 (COD No: 96-900-4180). Structural parameters such as dislocation density, lattice stress, unit cell volume, number of crystallites per unit area have been calculated and its dependency with thickness was studied. As the film thickness increases, the crystallite size also increases. Through FTIR, chemical bonds and their stretching vibrations confirmed the metal-oxide phase formation. Scanning electron microscope images showed the formation of good quality film with regularly distributed spherical shaped grains. Roughness values of the films were attained from the Atomic force microscope images. In overall observations, precursor concentration has significant effect on film thickness which in turn modified the structural, optical and morphology properties of the prepared ZnO thin films.