We present the characterization of the dielectric permittivity and loss tangent of germanium telluride (GeTe) and germanium antimonium telluride (Ge2Sb2Te5-GST) phase change thin-films (less than 1 μm thicknesses) in the millimeter-wave (mmW) domain. The dielectric permittivities in the amorphous (insulator) state of GeTe and GST were measured using two independent differential methods: a wide bandwidth characterization based on the measurement of the propagation constant of a coplanar waveguide and a single frequency characterization based on the measurement of the resonant frequency of a planar resonator. This differential approach allows us to extract the permittivity of the thin film without taking into consideration other parameters of the circuit like the conductivity and the thickness of the metals as well as the losses of the substrate and their permittivity. The extracted mean values range between are 20-22 for the GeTe and 30-34 for the GST. These values are rather constant over the frequency range from 10 GHz to 60 GHz. Additionally, the loss tangent at 30 GHz of both compositions was extracted giving values of 3.4x10 -2 and 3.2x10 -1 for the GeTe and GST, respectively. These values are among the first reported ones regarding the electromagnetic properties of GeTe and GST in this frequency band.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.