Atomically precise fabrication methods are critical for the development of next-generation technologies. For example, in nanoelectronics based on van der Waals heterostructures, where two-dimensional materials are stacked to form devices with nanometer thicknesses, a major challenge is patterning with atomic precision and individually addressing each molecular layer. Here we demonstrate an atomically thin graphene etch stop for patterning van der Waals heterostructures through the selective etch of two-dimensional materials with xenon difluoride gas. Graphene etch stops enable one-step patterning of sophisticated devices from heterostructures by accessing buried layers and forming one-dimensional contacts. Graphene transistors with fluorinated graphene contacts show a room temperature mobility of 40,000 cm2 V−1 s−1 at carrier density of 4 × 1012 cm−2 and contact resistivity of 80 Ω·μm. We demonstrate the versatility of graphene etch stops with three-dimensionally integrated nanoelectronics with multiple active layers and nanoelectromechanical devices with performance comparable to the state-of-the-art.

Harnessing the properties of vortices in superconductors is crucial for fundamental science and technological applications; thus, it has been an ongoing goal to locally probe and control vortices. Here, we use a scanning probe technique that enables studies of vortex dynamics in superconducting systems by leveraging the resonant behavior of a raster-scanned, magnetic-tipped cantilever. This experimental setup allows us to image and control vortices, as well as extract key energy scales of the vortex interactions.Applying this technique to lattices of superconductor island arrays on a metal, we obtain a variety of striking spatial patterns that encode information about the energy landscape for vortices in the system. We interpret these patterns in terms of local vortex dynamics and extract the relative strengths of the characteristic energy scales in the system, such as the vortex-magnetic field and vortex-vortex interaction strengths, as well as the vortex chemical potential. We also demonstrate that the relative strengths of the interactions can be tuned and show how these interactions shift with an applied bias. The high degree of tunability and local nature of such vortex imaging and control not only enable new understanding of vortex interactions, but also have potential applications in more complex systems such as those relevant to quantum computing.

The original version of this Article contained an error in the second sentence of the second paragraph of the ‘Electrical properties of fluorinated graphene contacts’ section of the Results, which incorrectly read ‘The mobility was calculated by the Drude model, μ = ne/σ where μ, n, e, and σ are the carrier mobility, carrier density, electron charge, and sheet conductivity, respectively’. The correct version states ‘μ = σ/ne ’ in place of ‘μ = ne/σ ’. This has been corrected in both the PDF and HTML versions of the Article.

The critical behavior of disordered systems-from metals (1) to magnets (2) and superconductors (3)-is often dominated by the behavior of "rare regions" of a correlated phase, which control the inception and dynamics of the phase transition. Yet, despite significant theoretical (3,4,5) and experimental (6,7,8,9) interest, there has been little direct evidence of the presence of these regions, or of their role in initiating transitions. Here, we provide direct evidence for rare-region effects at the onset of superconductivity in granular superconducting islands. By considering the strong diameter-dependence of the transition, as well as observations of large fluctuations in the transition temperature as island diameters decrease, we are able to show that superconducting order first appears in unusually large grains-i.e., rare regions-within each island and, due to proximity coupling, spreads to other grains. This work thus provides a quantitative, local understanding of the onset of correlated order in strongly disordered systems.Strong disorder can destroy superconductivity in films via a continuous quantum phase transition; in this case, most canonical theories predict a transition to an insulating state as the normal state resistance approaches the quantum of resistance (RQ ~ 6.4 KΩ) (10). However, multiple experiments have instead demonstrated suppressed superconductivity at much lower film resistances and phase transitions to low-resistance metals (11,12,13). The main theoretical paradigm for understanding such superconductor-metal transitions (3,4,5) assumes that the films possess emergent inhomogeneity, i.e.