Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatio-temporal models of the flexible dynamics are essential. In this paper, a two-step approach for the identification of the spatio-temporal behavior of mechanical systems is developed and applied to a prototype industrial wafer stage with a lightweight design for fast and highly accurate positioning. The proposed approach exploits a modal modeling framework and combines recently developed powerful linear time invariant (LTI) identification tools with a spline-based mode-shape interpolation approach to estimate the spatial system behavior. The experimental results for the wafer stage application confirm the suitability of the proposed approach for the identification of complex positiondependent mechanical systems, and show the pivotal role of the obtained models for improved motion control performance.

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The benchmark Active Vibration Isolation System (AVIS) in this paper is a complex high-tech industrial system used in vibration and motion control applications. The system is complex in the sense of high order flexible dynamics and multiple inputs and outputs. The aim of this benchmark is to compare different black box, linear time invariant system identification algorithms. Different large data sets are provided, enabling the use of both frequency domain and time domain identification approaches. The idea of the benchmark is to investigate both model accuracy and numerical reliability of the computational steps. Several reference solutions are provided, which demonstrate the challenging aspects of this benchmark already in the singleinput single-output case. The benchmark data and additional info are available on the website of Tom Oomen 1 .

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