This paper presents a new method for the calibration of network analyzers. The essential feature is the use of multiple, redundant transmission line standards. The additional information provided by the redundant standards is used to minimize the effects of random errors, such as those caused by imperfect connector repeatability. The resulting method exhibits improvements in both accuracy and bandwidth over conventional methods. The basis of the statistical treatment is a linearized error analysis of the TRL (thru-reflect-line) calibration method. This analysis, presented here, is useful in the assessment of calibration accuracy. It also yields new results relevant to the choice of standards.
This work generalizes and extends the classical circuit theory of electromagnetic waveguides. Unlike the conventional theory, the present formulation applies to all waveguides composed of linear, isotropic material, even those involving lossy conductors and hybrid mode fields, in a fully rigorous way. Special attention is given to distinguishing the traveling waves, constructed with respect to a well-defined characteristic impedance, from a set of pseudo-waves, defined with respect to an arbitrary reference impedance. Matrices characterizing a linear circuit are defined, and relationships among them, some newly discovered, are derived. New ramifications of reciprocity are developed. Measurement of various network parameters is given extensive treatment.
A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.
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