Vanadium pentoxide (V2O5) films capped with a thin ZnO layer were prepared by magnetron sputtering at room temperature. The effect of annealing on the microstructure and optical properties of films was systematically investigated. Results indicated that the initially smooth films transformed to porous composite nanocrystals at 500 °C and then further to agglomerated nanoslices at 550 °C. This microstructure transformation is attributed to the distinct temperature-sensitive crystallization of V2O5. The annealed films exhibited enhanced visible photoluminescence, which was attributed to the coupling between V2O5 nanorods and ZnO nanoparticles as well as the improved V2O5 crystallinity.

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