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Fault diagnosis accuracy is not high for traditional multivariate statistical methods ,in this paper , the deflection sensor fault diagnosis method based on independent component analysis was proposed .This method not only removed the relationship between process variables , but also make full use of higher order statistical properties of process variables ,establish the independent element model of the process information, finally ,simulation the multivariate process model in the system ，the simulation result shows that this method can quickly and accurately detect the abnomal occurred in the system ,verify the validity of this method and advantage compared with taditional PCA method.