Nano imprint lithography (NIL) is highly productive process and has an advantage in its resolution of printed patterns. General NIL processes have been performed for organic resin materials, on the other hand, inorganic materials such as ceramic and glass materials have also been tried to be imprinted using mixtures of nano powders and polymer binder as starting materials. Authors already have reported this process for inorganic materials. In our previous work, line-and-space patterns with the smallest pitch of about 8 μm were shown on sintered ceramic sheets using ceramic powders with the smallest particle size of about 100 nm. In this study, we prepared alumina powders with the average particle size of about 100 nm and 5 kinds of mold with line-and-space patterns with line widths from 10 μm to 250 nm. We discussed how the pattern was affected by mold size and particle size.
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