Electrical conductivity of silica nanoparticles deposited on electrodes from colloidal suspension were measured under controlled relative humidity (RH). The electrical conductivity values at 1 kHz increased with increasing RH. Amounts of water adsorbed on silica nanoparticles were measured by quartz crystal microbalance (QCM) and they also increased with increasing RH. An empirical power law relation was observed between the reported surface conductivity and RH data for a silica glass. By applying this relation to the silica nanoparticles, the water film thicknesses are estimated to be from 0.08 nm to 0.23 nm. The corresponding specific surface area (SSA) becomes smaller (102 m 2 g −1) than the reported value (215 m 2 g −1), indicating aggregation of the nanoparticles. In fact, aggregated rod-like structures were observed under electron and laser scanning microscopy. The electrical conduction of deposited silica nanoparticles under various RH can be understood by surface conduction in thin water films adsorbed on the nanoparticles.

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