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Ultrasound transducers with center frequency above 100 MHz are expected to be used for future diagnostic tissue characterization because of their high lateral resolution. We have fabricated a 120-MHz transducer that consists of a ZnO piezoelectric film on a sapphire substrate that has a concave acoustic lens. The lateral resolution was calculated as 13 microns. The insertion loss of the transducer, defined as the difference between the received voltage and the transmitted one, was -45 dB. The 6-dB handwidth of the received signal was approximately 40 MHz. The transducer was mounted in a rod-shaped probe to ensure contact with in vivo tissue, because of the low penetration of ultrasound in the high frequency region. While the probe is rotated and moved along its axis mechanically, the transducer receives backscattered ultrasound from the surrounding tissue on a cylindrical plane that is kept a constant distance from the probe surface. The feasibility of this high-frequency tissue imaging probe has been demonstrated by obtaining preliminary images of an in vitro bovine kidney.

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