L XAFS spectra of polycrystalline Fe and Cr films are investigated by EXAFS and TEY (Total Electron Yield) techniques. A new method of obtaining local structure information from overlapping L XAFS spectra for 3d metals is proposed. Tikhonov regularization method of solving ill-posed problem is used. In contrast to the conventional methods (Fourier transformation and fitting procedures) this method does not demand any model assumption and any special procedure of deconvolution of L 1 -, L 2 -, L 3 -contributions. The parameters obtained from L XAFS spectra of polycrystalline Fe and Cr films (interatomic distance and coordination number for the first and the second coordination shells) agree with the expected crystallographic values. Up to now the regularization method was applied only to nonoverlapping XAFS spectra.

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