We apply total internal reflection to significantly extend the effective length of KBe 2 BO 3 F 2 crystal. Thus the conversion efficiency for second-harmonic generation can be increased in principle. However, the total reflection also leads to an adverse effect on the conversion efficiency. Three multiple-pass configurations to extend the effective interaction length of the crystal are proposed and discussed in this paper. Numerical analysis shows that the double-pass configuration is more favorable for second-harmonic generation to below 200 nm. At the medium input intensity of 200 MW/cm 2 , the configuration gives a conversion of 27.1% at the second-harmonic wavelength of 193 nm. A conversion of 45.2% is obtained as the input intensity is increased to a higher value of 500 MW/cm 2 .
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