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A solution process was used to grow SrTiO 3 ( STO ) buffer layers on LaAlO 3 ( LAO ) and biaxially textured Ni substrates by spin coating technique. The epitaxial STO film obtained has strong cube texture and uniform microstructure. A metal organic decomposition process using trifluoroacetate precursors was applied to deposit YBa 2 Cu 3 O 7-δ ( YBCO ) thin films on these buffer layers. The YBCO / STO / LAO was biaxially textured and the T Conset and Δ T C is 90.1K and 2.7K, respectively.