The properties of an asymmetric microwave gas discharge that occurs in an argon-filled resonator chamber of a processing plant near the surface of a metal product during the formation on it of a composite structure are experimentally and theoretically investigated. It is shown that with a significant difference between the electrode dimensions, the smaller of which is the product, and the larger are the resonator chamber walls, there is an area of a high energy density of the microwave field near the surface of the product, in which electrons are accelerated to high energies up to hundreds of eV. Diffusing from this area, high-energy electrons are decelerated due to inelastic scattering on the gas molecules that fill the resonator chamber, ionizing them or promoting them to an excited state. We have obtained a differential equation and found its solution which describes the diffusion process accompanied by the loss of energy by high-energy electrons, within the framework of the continuous deceleration model. The estimates of the main physical parameters characterizing the microwave gas discharge plasma are found. The conditions that are most favorable for the energy transfer from the microwave field to the plasma electron subsystem and the product surface treatment are determined.

The properties and effects of a combined gas discharge, obtained by superimposing ultrahigh frequency electromagnetic and electrostatic fields on the surface of metal products, have been studied. Estimates for the main physical properties characterizing the discharge have been obtained. The paper shows that the properties of a combined discharge essentially depend on the sign of the constant electric potential of the workpiece. In the case of a positive potential, there is a substantial hardening of the metal surface layer. Blanket coating formation, which is a nanocomposite twophase structure, has been recorded.

Abstract. The article examines the physical processes associated with the formation and the impact of low-temperature plasma of combined discharge on the surface of metal products. It has been shown theoretically and experimentally that the propertiesgas discharge and the results of its action on the product surface depend significantly on the sign of the bias potential.

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