Ultrananocrystalline diamond (UNCD) films, grown using microwave plasma-enhanced chemical vapor deposition with gas mixtures of Ar–1%CH4 or Ar–1%CH4–5%H2, have been examined with transmission electron microscopy (TEM). The films consist of equiaxed nanograins (2–10 nm in diameter) and elongated twinned dendritic grains. The area occupied by dendritic grains increases with the addition of H2. High resolution electron microscopy shows no evidence of an amorphous phase at grain boundaries, which are typically one or two atomic layer thick (0.2–0.4 nm). Cross-section TEM reveals a noncolumnar structure of the films. The initial nucleation of diamond occurs directly on the Si substrate when H2 is present in the plasma. For the case of UNCD growth from a plasma without addition of H2, the initial nucleation occurs on an amorphous carbon layer about 10–15 nm thick directly grown on the Si substrate. This result indicates that hydrogen plays a critical role in determining the nucleation interface between the UNCD films and the Si substrate. The relation between diamond nuclei and Si is primarily random and occasionally epitaxial.
high-temperature mechanical behaviour. The strength is Alumina/SiC nanocomposites were produced by mechanical mixture of commercial powders. The preparation steps involved the vigorous mixing of the powders and drying under conditions where the homogeneous mixture was kept stable. Pressureless sintering of die-pressed powders achieved reasonable densities (~9 7 % theoretical density) for 2.5wt% of Sic on sintering at 2073 K. Higher Sic contents strongly reduced the sintered density. The use of a more reactive alumina (finer matrix powder) gave similar results. Hot pressing at 19 73 K / 1 h/25 MPa produced highdensity materials for Sic contents as high as 20 wt%. Transmission and scanning electron microscopy analysis showed that the Sic particles were well distributed and were situated both inside the grains and on the grain boundaries of the alumina matrix. The Sic strongly inhibited grain growth in the matrix in keeping with the Zener model. The bend strength increased as the Sic content increased, a result partly explained by the grain size refinement. The strength improvement of 20% over monolithic was explained in terms of the change to an intergranular fracture mode.
A detailed study of the static bending of micro-cantilevers has been performed for structures created from thin 3C-SiC films grown on (100) and (111) oriented silicon substrates. The biaxial stress distribution in the direction of the film normal has been evaluated based on analysis of the deformation profiles of clamped-free 3C-SiC beams of various thicknesses. Surprisingly, the obtained results clearly indicate that for as-grown samples of both studied orientations, the absolute value of the intrinsic stress increases from the interface to the surface of the film. We propose a simple analytical model of a relaxation process that explains in a quantitative way this unexpected phenomenon of stress gradient inversion.
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