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Mn-doped multiferroic BiFeO3 (BFMO) thin films were deposited on LaNiO3(LNO)/SrTiO3(STO)/Si(100) substrates by pulsed laser deposition (PLD) technique. X-ray diffraction (XRD) showed that films were bicrystalline single phase with (110) preferential orientation. Multiferroic top layer and oxide bottom electrode (LNO) epitaxially followed the buffer layer (STO). Oxygen partial pressure during deposition proved to be critical for phase formation, crystallinity and resistivity of the films. Atomic force microscopic (AFM) studies revealed the smooth, dense and crack free surfaces of the films. Cross-section view of the multilayers by field emission scanning electron microscope (FE-SEM) gave their thickness. Mn substitution resulted in the increase of magnetization saturation, coercive field and clarity of hysteresis loop. The magneto-electric (ME) effect was demonstrated by measuring the dielectric response in a varying magnetic field. Optimally deposited BFMO films show saturated P-E loop.