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For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ∼ 4% sensitive hydrogen 200 ppm in the air at room temperature.

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Abstract-In this work, ultra-thin TiO 2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO 2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (I UVON /I UVOFF~3 8) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 ˚C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 ˚C for 3 min, have shown hydrogen gas response (~3.75).