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Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor J. Appl. Phys. 98, 014905 (2005); 10.1063/1.1940138 Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor deposition In this work, antiwear nanoimprint templates were made by depositing and patterning diamondlike carbon ͑DLC͒ films on Si and quartz. A capacitively coupled plasma enhanced chemical vapor deposition ͑PECVD͒ system was configured to deposit 100 nm-1 m thick DLC films on Si and quartz substrates. These films were characterized with Raman spectroscopy, electron energy loss spectroscopy, atomic force microscopy, nanoindentation, contact angle measurements, and optical transmission measurements. The rf power and pressure of the PECVD process were varied to obtain uniform coating of DLC films with smooth surface ͑ϳ0.2 nm rms͒, low surface energy ͑ϳ40 mJ/ m 2 ͒, and high hardness ͑ϳ22 GPa͒. The resulting films' wear resistance is more than three times better than quartz. The DLC films were patterned by nanoimprint lithography using polymethylmethacrylate ͑PMMA͒ followed by CF 4 plasma etch. Thermal nanoimprint tests with DLC templates were performed in PMMA. Atomic force microscopy measurements indicated excellent pattern-transfer fidelity and template-polymer separation.

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