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We demonstrate a novel fabrication technology for painless microneedle array with PMMA (PolyMethylMeta Acrylic). In order to make painless transdermal microneedle array for drug injection and blood extraction, inclined LIGA process is applied to demonstrate the fabrication feasibility. This process provides more sharp, robust and high out-ofplane microneedle array structure than conventional silicon based microneedle array. The microneedle proto-types, which have different shape of tip, base and hole type, have been successfully fabricated and tested by penetrating buman band skin to extract whole blood. With the new fabrication technology, microneedles bad sufficient mechanical strength, height and sharpness to penetrate band skin without pain and needle tip break. The PMMA microneedle array can be used as a mass production mold base for nickel electroplating process; on the other band, silicon based microneedle array is used in itself.

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This paper reports the fabrication process of a ZnO piezoelectric micro cantilever with a high-aspectratio (HAR) nano tip for the scanning probe microscopy (SPM). The HAR nano tip has 5pm side length, over 15" height, and less than 30nm tip radius, which is built on the cantilevers with 200pm and 300pm length.The designed resonance frequency and spring constant of cantilever with 300pm length are 28.41Wz and 0.6986N/m, respectively. To prevent the distortion of data by the cantilever, the HAR nano tip is fabricated using deep RIE process and LPCVD poly-Si deposition. These steps protect nano tips during the whole process and minimize tip damage. To compensate residual :stress, the multi-layered structure is used. It is composed of silicon nitride and poly silicon which have tensile and compressive stresses, respectively. And, to prevent ZnO breakdown and metal oxidation during anodic bonding process, internal metal patterns are isolated from the pyrex glass. After the boding process, they are connected with external electrodes through the via holes in pyrex glass.