This paper reports on the resistivity of vacuum-deposited thick films at frequencies ranging from 300 MHz to 1 GHz. The process used to prepare the films is described and the metal film thickness was varied between 5000 and 40 000 Å. The films were prepared in the form of an inductor whose self-resonant frequency approached 2 GHz. The resistivity of the films at a given frequency was determined by a sweep frequency technique. This method permits the measurement of Q and the inductance of coils within the desired range of frequencies.