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ABSTRACT

Two-dimensional transient simulations are presented of the transport phenomena and multispecies, multireaction chemistry in chemical vapor deposition (CVD). The transient simulations are run until steady state, such that the steady state can be validated against the steady state solutions from literature. We compare various time integration methods in terms of efficiency and robustness. Besides stability, which is important due to the stiffness of the problem, preservation of non-negativity is crucial. It appears that this latter condition on a time integration method is much more restrictive toward the time step size than stability.

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