Ba 0.5 Sr 0.5 TiO 3 (BST) thin films are among the best-known ferroelectric and dielectric materials. Ce-doped BST films have been fabricated by pulsed laser deposition in order to enhance their dielectric properties. X-ray diffraction, atomic force microscopy, and Raman spectroscopy have been used to study variations of crystal structure, surface morphologies, and phase stability of Ce-doped BST films, respectively. A strong influence of Ce doping on the properties of the BST films has been observed. First, a small amount of Ce dopant makes easy epitaxial growth of a BST film with a smooth surface on a MgO substrate. Second, residual stress in a BST film on a MgO substrate can be reduced by Ce doping, as demonstrated by the blueshift of phonon peaks in Raman spectroscopy.

Effect of Co doping on leakage current has been investigated in capacitor consisting of Ba0.5Sr0.5Ti1−xCoxO3 (BSTC, x=0, 0.002, 0.010) thin film, Pt top electrode, and Nb-doped SrTiO3 (STON) bottom electrode. Co doping remarkably decreases the leakage current in BSTC thin film, such as from 9×10−7 A in undoped thin film to 8×10−11 A in 1.0 at. % Co-doped BSTC thin film at bias voltage of 6 V. In the case of the Pt electrode positively biased, the leakage current shows space-charge-limited-current behavior. The trap-filled-limit voltage and the calculated trapped electron density increase with Co concentration in BSTC thin film. The mechanism of the reduction of the leakage current by Co doping is discussed.