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Silver doped Indium sulphide thin films with different [Ag/In] molar ratio concentrations (0, 0.9, 1.0, 1.1) were deposited on glass substrates using chemical bath deposition method. The films were deposited by varying the [Ag/In] ratio from 0 to 1.1. The structural, morphological, optical and electrical properties are characterized using XRD, SEM AFM, EDAX, spectrophotometer and Hall measurement system, respectively. Kramers-Kronig method was used to obtain optical constants of the films. It is found that Ag can change physical properties of Indium sulfide thin films, depending on the dopant concentration. XRD results show the incorporation of Ag dopant did not change the structure of In2S3. Doped films tend to be non-uniform with rough surfaces. As the [Ag/In] molar ratio increased, conductivity increases and optical direct band gap energy decreases drastically from 2.75 to 2.38 eV.

One of the most efficient methods for Ultra High Vacuum (UHV) measurement is the use of hot-filament ionization gauge which has been employed for several decades and can quantify pressures up to 〖10〗^(-12) torr. Large volume and high-power consumption are main drawbacks of this gauge. In this paper, a MEMS type ionization vacuum gauge has been introduced which occupies a volume of 3mm×1.5mm×1.5mm and is manufacturable with micromachines technology. Also, it operates based on gas ionization. In addition of low volume, the proposed structure has the advantages of low power consumption, low price and fast response time. With the help of COMSOL and MATLAB, a method has been proposed which helps us to obtain average length of movement for electron 1, average energy of the electrons, electron speed, elastic and ionization collision frequency and sensitivity coefficient S. Simulation results have been compared with theoretical analytic results in which there is good conformity between these results. Also, by means of the presented method in this article, the physical characteristics of the gauge can be optimized to achieve better performance. For the proposed scheme by introducing the magnetic field as the novel idea, the sensitivity coefficient has been enhanced up to 60% in comparison with similar structures.

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