Abstract. The design, manufacturing, and performance characterization of a MEMS-scale turbine prototype is reported. The turbine is designed for integration into a respiration harvester that can convert normal human breathing into electrical power through electromagnetic induction. The device measures 10 mm in radius, and employs 12 blades located around the turbine periphery along with ball bearings around the center. Finite element simulations showed that an average torque of 3.07 μNm is induced at 12 lpm airflow rate, which lies in normal breathing levels. The turbine and a test package were manufactured using CNC milling on PMMA. Tests were performed at respiration flow rates between 5-25 lpm. The highest rotational speed was measured to be 9.84 krpm at 25 lpm, resulting in 8.96 mbar pressure drop across the device and 370 mW actuation power.

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A linear non-resonant kinetic energy harvester for implantable devices is presented. The design contains a metal platform with permanent magnets, two stators with three-dimensional helical coils for increased power generation, ball bearings, and a polydimethylsiloxane (PDMS) package for biocompatibility. Mechanical excitation of this device within the body due to daily activities leads to a relative motion between the platform and stators, resulting in electromagnetic induction. Initial prototypes without packaging have been fabricated and characterized on a linear shaker. Dynamic tests showed that the friction force acting on the platform is on the order of 0.6 mN. The resistance and the inductance of the coils were measured to be 2.2 Ω and 0.4 µH, respectively. A peak open circuit voltage of 1.05 mV was generated per stator at a platform speed of 5.8 cm/s. Further development of this device offers potential for recharging the batteries of implantable biomedical devices within the body.