This paper demonstrates the development of optical temperature sensor based on the etched silica-based planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating optical temperature sensor. The typical bandwidth and reflectivity of the surface etched grating has been -0.2 nm and -9 %, respectively, at a wavelength of -1552 nm. The temperature-induced wavelength change is found to be slightly non-linear over -2oo·C temperature range. Typically, the temperature-induced fractional Bragg wavelength shift measured in this experiment is 0.0132 nmj"C with linear curve fit. Theoretical models with nonlinear temperature effect for the grating response based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

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