Nanoscale yttria-stabilized zirconia (YSZ) electrolyte film was deposited by plasma-enhanced atomic layer deposition (PEALD) on a porous anodic aluminum oxide supporting substrate for solid oxide fuel cells. The minimum thickness of PEALD-YSZ electrolyte required for a consistently high open circuit voltage of 1.17 V at 500 °C is 70 nm, which is much thinner than the reported thickness of 180 nm using nonplasmatic ALD and is also the thinnest attainable value reported in the literatures on a porous supporting substrate. By further reducing the electrolyte thickness, the grain size reduction resulted in high surface grain boundary density at the cathode/electrolyte interface.
A simple, yet effective approach of stabilizing the nanostructure of porous metal‐based electrodes and thus, extending the life of microsolid oxide fuel cells is demonstrated. In an effort to avoid thermal agglomeration of metal electrodes, an ultrathin yttria‐stabilized zirconia (YSZ) is coated on the porous metal (Pt) cathode by the atomic layer deposition, a scalable, and potentially high‐throughput deposition technique. A very thin YSZ coating is found to maintain the morphology of its underlying nanoporous Pt during high temperature operations (500 °C). More interestingly, the YSZ coating is also found to improve oxygen reduction reaction activity by ≈2.5 times. This improvement is attributed to an enhanced triple phase area, especially in the vicinity of the Pt–electrolyte interface; cross‐sectional electron microscopy images indicate that the initially uniform ultrathin YSZ layer becomes a partially agglomerated coating, a favorable structure for a maximized reaction area and fluent oxygen access to the Pt–electrolyte interface.
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