Electrochemical discharge machining (ECDM) processes have been used to realize miniature structures such as micro-channels and micro-holes on non-conductive materials such as quartz and Pyrex for a variety of applications. However, for realizing mechanical/physical sensors, actuators, energy harvesters, and resonators on glass substrates, free-standing devices with movable components such as beam-mass structures and cantilevers are required. There has been a negligible focus on developing miniature glass-based devices with movable components primarily due to the non-linear material removal rate (MRR) of the ECDM processes, requiring continuous measurement, tracking, and maintaining the working gap in the range of a few micrometers during micromachining. A couple of techniques were proposed to address maintaining a constant working gap, however, using costly equipment with complex feedback mechanisms. We report a two-stage experimental approach – without using feedback mechanisms and additional equipment – to realize micro-mechanical planar cantilever beam-mass structures on thick quartz substrates in the present work. In the first stage, the process parameters such as applied voltage, tool travel rate (TTR), and initial working gap ( Wg) are optimized for fabricating broader and deeper micro-channels using needle-shaped tools. In the second stage, using the optimized parameters, an array of micro-channels is fabricated. The cumulative depth, corresponding depth, and the width of each layer of the channels are measured, and this data is utilized for fabricating planar beam-mass structures on quartz substrates. We envisage that the experimental results of the present study would be beneficial for ECDM researchers to fabricate glass-based miniature devices with movable components without using complex tools and equipment.

The working gap (Wg) between a tooltip and a substrate surface is a critical process parameter affecting the quality metrics and precision of microstructures fabricated using an electrochemical discharge machining (ECDM) process. Despite the extensive investigation carried out on ECDM processes for the last several years, only a few researchers have explicitly explained the technique used to establish the Wg. In the present work, the authors propose a simple, cost-effective technique using a commercially available metallic feeler gauge and a multimeter to precisely establish a Wg in an ECDM process. A systematic experimental investigation was carried out using the proposed method to study the influence of Wg on the quality metrics such as the depth, width, edge linearity, heat-affected zone, and surface finish of fabricated microstructures on a glass substrate. Experimental results revealed that even a 2 µm difference in Wg significantly influenced the quality and quantity metrics of an ECDM process. It was observed that no machining occurred beyond a Wg of 25 µm even when a TTR as low as 0.5 mm/min and an applied voltage greater than 44 V were used. A micro-channel with improved quality metrics was obtained using a tool travel rate (TTR) of 1 mm/min with an applied voltage of 33 V and a Wg of 2 µm while using 30% NaOH as an electrolyte. The proposed method would be helpful for researchers to fabricate precise micro-channels on glass substrates using ECDM processes.